Advanced Ceramics for the Semiconductor Industry
Over 100 years of experience in technical ceramics, combined with comprehensive process know-how and outstanding product characteristics make us one of the key go to solution partners, when it comes to ceramic components utilized in the semiconductor industry - from wafer polishing plates to electrostatic chucks. Because it is characterized by harsh processing environments and require the ability to withstand tough chemical and physical conditions resulting in long lasting functional performance and reliability.
Indispensable for the Semiconductor Business
Discover the advantages offered by our advanced ceramics portfolio and benefit from our solution expertise for a variety of handling and manufacturing processes in the semiconductor industry. We develop our ceramic components and parts according to your individual application requirements, so you can design and maintain your processes flexibly and reliably.
Because we see ourselves not only as a pure manufacturer of high-quality industrial ceramic products, but rather as a strong development partner who transform your requirements into individual solutions: with state of the art products, in almost any desired geometry and design, with the corresponding material properties and optimum functionality. In addition, extremely resistant to harsh environmental conditions such as heat, changing temperatures, mechanical stress and aggressive chemicals.
Our goal is your success
Take advantage and rely on CeramTec‘s ceramic experts. Whether in semiconductor wafer and wafer processing, semiconductor manufacturing or handling and packaging - our components made of high-purity technical ceramics (aluminum oxide and silicon carbide) ensure long lasting performance and reliability. As a result, you benefit from higher efficiency and productivity. For sure!
- Basic Suitability of Ceramics
- Selection of Materials
- Tailored Design & Construction
- Prototypes
- Risk Management
- Simulating and Modeling
- Specification
- Quality Assurance
- Series Production
- Change Management
- Audits
- Product Training
- Application Training
- Further Development and Know-How Transfer
- Basic Suitability of Ceramics
- Selection of Materials
- Tailored Design & Construction
- Prototypes
- Risk Management
- Simulating and Modeling
- Specification
- Quality Assurance
- Series Production
- Change Management
- Audits
- Product Training
- Application Training
- Further Development and Know-How Transfer
Components for the Semiconductor Industry
| Product | Features | Material |
| Wafer Polishing Plate | • High rigidity • Good chemical durability • Surface shape / roughness control | Al2O3 RUBALIT |
| Wafer Polishing Plate | • High thermal conductivity • Low thermal expansion • High rigidity | SiC ROCAR |
| Electrostatic Chucks | • High purity • High plasma durability • High chucking / de-chucking response | SiC ROCAR |
| Vacuum Chucks | • High purity • High chemical durability • Variety of surface design | SiC ROCAR |
| End Effectors / Wafer Handling | • High purity • Mirror polished surface | Al2O3 |
| End Effectors / Wafer Handling | • High purity • Good chemical durability • High rigidity • Mirror polished surface | SiC ROCAR |
| Chamber Rings / Sputtering Targets | • High purity • High plasma durability • High transmission factor | Al2O3 / SiC / AlN RUBALIT |
| Metallised Products | • IC Packages • High vacuum component • High voltage terminal | Al2O3 RUBALIT Stainless Steel Kovar |
